SANTA CLARA, Calif. — In a move to develop next-generation devices based on current lithography platforms, Intel Corp. here today announced a major cross-licensing agreement with Numerical ...

Numerical Technologies is trying to take its phase-shift mask technology out of just making shorter gates and into the interconnect layers of chips as the chipmakers try to push 193nm equipment deeper ...

Researchers review AI-powered inverse lithography, showing how deep learning boosts chip patterning precision and efficiency while facing scaling challenges. Computational lithography optimizes the ...

Experts at the Table: Semiconductor Engineering sat down to discuss optical and EUV photomasks issues, as well as the challenges facing the mask business, with Naoya Hayashi, research fellow at DNP; ...

Fig. 1 The lithography process. The projection lithography system. The advancement of semiconductor manufacturing is a key driver of electronic device innovations. As Moore’s Law progresses, ...