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Atomic-scale chip alignment: Laser holograms could set new standard for 3D semiconductor overlay accuracy
Scientists at the University of Massachusetts Amherst have introduced a novel method for aligning layers in chips using lasers and metalenses. The new technique is claimed to achieve accuracy down to ...
Semiconductor targets, on the other hand, are used in sputtering systems to deposit conductive or dielectric layers, essential for chip interconnects. As fabrication shifts toward more complex ...
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